Porous organosilicates low-dielectric films for high-frequency devices.

Knoesen, A.; Song, G.; Volksen, W.; Huang, E.; Magbitang, T.; Sundberg, L.; Hedrick, J. L.; Hawker, C. J. and Miller, R. D.;
J. Electron. Mater.
2004
33, 135-140.