Nanoporous, low-dielectric constant organosilicate materials derived from inorganic polymer blends.

Miller, R. D.; Volksen, W.; Lee, V. Y.; Connor, E.; Magbitang, T.; Zafran, R.; Sundberg, L.; Hawker, C. J.; Hedrick, J. L.; Huang, E.; Toney, M.; Huang, Q. R.; Frank, C. W. and Kim, H. C.;
Polymers for Microelectronics and Nanoelectronics,
2004
874, 144-160.